什么是TiN膜?
PVD涂层
有TiN, CrN, TiAlN, DLC
TiN films are obtained by ion implantation, deposition process or by combination of them on Si substrate。 The qualities of TiN films are studied by means of nano scratch test, SEM is used to observe the scratch morphologies。 The results show that dynamic combination...全部
PVD涂层
有TiN, CrN, TiAlN, DLC
TiN films are obtained by ion implantation, deposition process or by combination of them on Si substrate。
The qualities of TiN films are studied by means of nano scratch test, SEM is used to observe the scratch morphologies。
The results show that dynamic combination of ion implantation and deposition process can prominently increase the joint property between the films and substrate。
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